6 METAL DIE DE-LAYERING
AI REMOVAL
Metal 6
PAN Etch 40ºC 12 mins
H
3
PO
4
/CH
3
CO
2
H/HNO
3
/H
2
O
(16:2:1:1)
<
PREVIOUS
NEXT
>
PAN Etch 40ºC 12 mins
H3PO4/CH3CO2H/HNO3/H2O
AI REMOVAL
