6 METAL DIE DE-LAYERING
SiO
2
REMOVAL
Pad Etch 5 mins @23ºC
IR Image @ 900nm
Pad Etch (modified from Arch
Chemicals)
NH
3
F 13g / CH
3
CH
2
H 32ml
/ C
2
H
6
O
2
6ml / DI 49ml / TritonX100 1 drop
NOTE: Mouseholes -
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