Similar to the 880e, the 890e X-Y stage also accepts up to 200mm wafers,
but replaces the vacuum Z-stage with a fully automatic one. The
motorized Z-stage provides automatic thickness compensation and
maintains the desired probe tip over travel of +/- .0001 inches (2.5mm).
In addition, the unit comes with a motorized theta for "hands
off" adjustment within .0025 degrees. The 890e also features an
ultra rigid platform for vibration-free, sub-micron geometry
The unit features ergonomically designed operator controls, with an
eye-level 80-character, 1-inch x 8-inch display. The software control is
menu-driven and has three modes of operation (auto, manual and
external). The software also includes a diagnostic mode for quick
identification of system status.
It includes interface ports for TTL, IEEE-488 and R-232 communications.
Probers can be setup to operate in "hand shake" mode with a
tester, or as slave to tester. A computer can function as master, with
the prober and tester as slaves. Interface commands can be set
externally for "lights out" operation.
The system accommodates both stereo view optics and video monitors. The
probers come standard with two inker ports and two edge sense ports.
Also standard is the 4.5-inch probe cardholder.
This holder accepts both
probe cards and diagnostic manipulators.
Optional equipment is also available to enhance capabilities.