WAFER PROBERS

 

680e & 880e SEMI-AUTOMATIC PROBERS
The model 680e X-Y stage accommodates up to 150mm diameter wafers, while the 880e handles up to 200mm. The X-Y stages for both units are motorized with a .00025 (6.25 Ám). Both Z stages have a fixed travel of .012 inches (.3mm) and is vacuum control operated. A micrometer provides adjustable probe tip over travel. A manual theta control, located below the vacuum chuck, offers quick and easy adjustment.

The units feature ergonomically designed operator controls, with an eye-level 80-character, 1-inch x 8-inch display. The software control is menu driven and has three modes of operation (auto, manual and external). The software also includes a diagnostic mode for quick identification of system status.

Units include interface ports for TTL, IEEE-488 and R-232 communications. Probers can be setup to operate in "hand shake" mode with a tester, or as slave to tester. A computer can function as master, with the prober and tester as slaves. Interface commands can be set externally for "lights out" operation.

The systems accommodate both stereo view optics and video monitors. The probers come standard with two inker ports and two edge sense ports. Also standard is the 4.5-inch probe cardholder. This holder accepts both probe cards and diagnostic manipulators.

Options are also available to further augment the units.