880e SEMI-AUTOMATIC PROBERS
The model 680e X-Y stage accommodates up to 150mm diameter wafers, while
the 880e handles up to 200mm. The X-Y stages for both units are
motorized with a .00025 (6.25 Ám). Both Z stages have a fixed travel of
.012 inches (.3mm) and is vacuum control operated. A micrometer provides
adjustable probe tip over travel. A manual theta control, located below
the vacuum chuck, offers quick and easy adjustment.
The units feature ergonomically designed operator controls, with an
eye-level 80-character, 1-inch x 8-inch display. The software control is
menu driven and has three modes of operation (auto, manual and
external). The software also includes a diagnostic mode for quick
identification of system status.
Units include interface ports for TTL, IEEE-488 and R-232
communications. Probers can be setup to operate in "hand
shake" mode with a tester, or as slave to tester. A computer can
function as master, with the prober and tester as slaves. Interface
commands can be set externally for "lights out" operation.
The systems accommodate both stereo view optics and video monitors. The
probers come standard with two inker ports and two edge sense ports.
Also standard is the 4.5-inch probe cardholder. This holder accepts both
probe cards and diagnostic manipulators.
Options are also available to further augment the units.