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WAFER
PROBERS |
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260 &
860 MANUAL PROBERS
The models 260 and 860 wafer probers provide a simple, yet functional
choice for applications up 200mm. Their rugged design will give years of
reliable service.
Both probers have precise X-Y micrometer adjustment; the 260 with 100 mm
of X-Y travel and the 860 with 200mm of travel. The Z height contact
position is controlled manually by adjusting a 1-inch micrometer. The
probes can be quickly raised or lowered .012 inch (.3mm), by using one
of two levers located on the left or right side of the machine. A
spindle located on the side of the vacuum chuck easily adjusts theta
rotation.
Optics packages are available with either a Leica or Olympus
microscopes. An optional microscope mount package permits X-Y adjustment
for rapid centering of the optics over any portion of the wafer or
substrate. Additional options are available to enable the user to
perform a wide range of probing tasks. |
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